19
2021
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11
DIW/IWW Project of IMECAS
Author:
IMECAS is a comprehensive research and development institution with the most complete discipline orientation in the field of microelectronics in China. It is the supporting unit of the EDA Center of the Chinese Academy of Sciences, the Internet of Things Research and Development Center of the Chinese Academy of Sciences, the leading organization for the forward-looking research and development of integrated circuit equipment and processes for major national science and technology projects, the supporting unit of the School of Microelectronics of the University of Chinese Academy of Sciences (national demonstration School of Microelectronics), and the supporting unit for the preparation of the Institute of Integrated Circuit Innovation of the Chinese Academy of Sciences. It has a wide influence in the field of microelectronics in China and has played an irreplaceable important role in supporting the core competitiveness of China's microelectronics industry.
UPW and wastewater system of IMECAS
The predecessor of the Institute of Microelectronics of the Chinese Academy of Sciences (hereinafter referred to as "IMECAS"), the former Factory 109 of the Chinese Academy of Sciences, was founded in 1958. In 1986, Factory 109 merged with the Institute of Semiconductors and the Institute of Computing Technology of the Chinese Academy of Sciences to form the Microelectronics Center of the Chinese Academy of Sciences.
IMECAS is a comprehensive research and development institution with the most complete discipline orientation in the field of microelectronics in China. It is the supporting unit of the EDA Center of the Chinese Academy of Sciences, the Internet of Things Research and Development Center of the Chinese Academy of Sciences, the leading organization for the forward-looking research and development of integrated circuit equipment and processes for major national science and technology projects, the supporting unit of the School of Microelectronics of the University of Chinese Academy of Sciences (national demonstration School of Microelectronics), and the supporting unit for the preparation of the Institute of Integrated Circuit Innovation of the Chinese Academy of Sciences. It has a wide influence in the field of microelectronics in China and has played an irreplaceable important role in supporting the core competitiveness of China's microelectronics industry.
Ⅰ. Treatment scale:
720 m³/d
Ⅱ. Main process:
1. UPW process: pre-treatment system + ultrafiltration system + reverse osmosis system + EDI + mixed bed + ultimate ultrafiltration system
2. Recycling process: process the 1st RO concentrated water of Phase I pure water through reverse osmosis treatment, and then return the produced water to the pre-treatment water tank of the Phase I UPW system for recycling and reuse
Manganese sand filter + activated carbon filter + 1st RO system + produced water
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