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2021
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09
CDAT DIW/IWW Project of Texas Instruments Semiconductor Manufacturing (Chengdu) Co., Ltd.
Author:
Texas Instruments Semiconductor Manufacturing (Chengdu) Co., Ltd. (hereinafter referred to as TI Chengdu) opened for business on October 13, 2010, and is TI's first wafer manufacturing base established in China. The 8-inch wafer fab can add 23,000 square meters of production space for TI, bringing in $1 billion in simulated production capacity annually.
TI CDAT1 project:
Texas Instruments Semiconductor Manufacturing (Chengdu) Co., Ltd. (hereinafter referred to as TI Chengdu) opened for business on October 13, 2010, and is TI's first wafer manufacturing base established in China. The 8-inch wafer fab can add 23,000 square meters of production space for TI, bringing in $1 billion in simulated production capacity annually. The project includes two parts: UPW and wastewater. The UPW section uses a secondary polishing water supply system with a capacity of 70 cubic meters per hour (CMH). The wastewater section includes a recycling system and an acid-base neutralization system.
Ⅰ. Treatment scale:
1. DIW UPW Polishing System 1680CMD
2. Wafer cutting wastewater recycling system 480CMD, Backgrinding & Package grinding wastewater recycling system 960CMD, IWW acid-base neutralization system 4320CMD
Ⅱ. Main process:
1. UPW process: heat exchanger + UV sterilization + mixed bed + ultimate filter
2. Recycling process: multi-media filtration + ultrafiltration
3. Wastewater treatment process: chemical coagulation precipitation, acid-base neutralization
TI CDAT2 project:
1. Treatment scale:
7,200 d/m³
2. Main process:
The UPW system employs a multi-media filter (MMF) system, an activated carbon filter (ACF) system, a reverse osmosis (RO) system, a mixed bed (MB) system, an ultraviolet (UV) disinfection system, a polishing mixed bed (PMB) system, a deionized water (DIW) supply and return water management system, as well as supporting cleaning, chemical dosing, and heat exchange systems.
The wastewater from the TI CDAT2 DIW & IWW system includes cutting wastewater, grinding wastewater, packaging wastewater, degumming wastewater, and waste liquids. The wastewater treatment system involves processes such as multi-media filtration (MMF) system, ultrafiltration (UF) system, coagulation and flocculation chemical treatment and precipitation system, as well as supporting dosing system and sludge dewatering system. After ultrafiltration treatment, the produced water is reused, and the collected waste liquids are handled by external contractors.
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