Products & Services
UPW Distribution Systems
Gaopin Tech is equipped with ultra-pure and stable delivery systems to prevent the precipitation of any organic matter, ions, and other impurities and ensure a 24-hour uninterrupted circulating supply in readiness for feeding process water.
Products & Services
The UPW is transported from the treatment units of UPW preparation system to the vicinity of the process equipment in each area of the semiconductor cleanroom through supply and return pipelines. Valves corresponding to the water consumption of process equipment are reserved near the equipment in the supply and return pipelines. Before connecting to the equipment, the supply and return valves are connected to the pipelines to avoid the formation of stagnant water. When the equipment is not consuming UPW, the water is returned to the UPW tank through the return pipelines, maintaining continuous circulation in the pipes 24h a day.
In order to maintain constant pressure within the pipes and meet the water consumption requirements of the process equipment, when the water consumption varies, the pressure in the pipes remains constant through variable frequency adjustment of the booster pump and opening adjustment of the proportional control valve at the return pipeline. The water supply flow rate is typically 20% to 50% higher than the water consumption rate, ensuring that the return pipeline does not experience low flow speeds that could lead to bacterial growth, especially when the process equipment consumes large amounts of water.
The pipes of the distribution system must exhibit extremely stable, with virtually no leaching of impurities such as organics or ions, ensuring that the UPW is supplied to the equipment without contamination.
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